Product Details
The switch direction logo design on upper cover to facilitate users to load or remove wafer.
The buckle position matching design which effectively avoids the problem of the upper cover falling out during the transportation process.
Spring design inside the cover can effectively avoid the wafer movement,prevent wafer breakage,minimize particle generation.
Provide Ultra Clean PP and Antistatic PP materials for customer.
Wafer Size |
Material |
Surface Resistance |
Internal Diameter |
3″(75mm) |
Ultra Clean PP |
N/A |
75mm |
3″(75mm) |
Antistatic PP |
10E4Ω-10E11Ω |
75mm |
4″(100mm) |
Ultra Clean PP |
N/A |
100mm |
4″(100mm) |
Antistatic PP |
10E4Ω-10E11Ω |
100mm |
6″(150mm) |
Ultra Clean PP |
N/A |
150mm |
6″(150mm) |
Antistatic PP |
10E4Ω-10E11Ω |
150mm |
8″ (200mm) |
Ultra Clean PP |
N/A |
200mm |
8″ (200mm) |
Antistatic PP |
10E4Ω-10E11Ω |
200mm |
12″(300mm) |
Ultra Clean PP |
N/A |
300mm |
12″(300mm) |
Antistatic PP |
10E4Ω-10E11Ω |
300mm |